Early Stages of Oxygen Precipitation in Silicon


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Initial Stage of Oxygen Precipitation in Silicon

Shumov and V. Nauki 46, Ukraine Key words: oxygen, silicon, germanium, thermal donors It is known the efficiency of oxygen-related thermal donors TD formation in silicon depends on its impurity composition. Especially it is concerned isovalent impurities such as C and Ge.

How to Balance Si + O2 = SiO2 (Silicon + Oxygen gas)

In this work the investigation of influence of doping with germanium on the processes of low temperatures degrees C thermodonors formation in Si are presented. The concentration of Ge in Si was altered from 3x10 18 to 2x10 20 cm The measurements were made using IR Fourier spectroscopy.

We have observed appearance of new additional TD absorption lines and also complex structure of individual bands at the concentration of Ge more than 5x10 18 cm -3 in Si.


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The energy position of these lines is very close to that for lines observing in specially undoped Si. Using illumination the components connected with transitions from exited states were distinguished. Three groups of lines connected with new TD types in Si were identified using the calculations in the effective mass theory approximation. Khirunenko, V.


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Shakhovtsov V. Shumov and V.

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Nauki 46, Ukraine Key words: oxygen, silicon, germanium, thermal donors It is known the efficiency of oxygen-related thermal donors TD formation in silicon depends on its impurity composition. Especially it is concerned isovalent impurities such as C and Ge. In this work the investigation of influence of doping with germanium on the processes of low temperatures degrees C thermodonors formation in Si are presented.

The concentration of Ge in Si was altered from 3x10 18 to 2x10 20 cm The measurements were made using IR Fourier spectroscopy. We have observed appearance of new additional TD absorption lines and also complex structure of individual bands at the concentration of Ge more than 5x10 18 cm -3 in Si.


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The energy position of these lines is very close to that for lines observing in specially undoped Si.

Early Stages of Oxygen Precipitation in Silicon Early Stages of Oxygen Precipitation in Silicon
Early Stages of Oxygen Precipitation in Silicon Early Stages of Oxygen Precipitation in Silicon
Early Stages of Oxygen Precipitation in Silicon Early Stages of Oxygen Precipitation in Silicon
Early Stages of Oxygen Precipitation in Silicon Early Stages of Oxygen Precipitation in Silicon
Early Stages of Oxygen Precipitation in Silicon Early Stages of Oxygen Precipitation in Silicon
Early Stages of Oxygen Precipitation in Silicon Early Stages of Oxygen Precipitation in Silicon

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